Untersuchungen zur Oberflächenvorbehandlung vor der MoSi-Mischschichtabscheibung - Etudes de prétraitement de la surface avant le dépôt de couches mixtes MoSi - Investigation of surface pretreatment before MoSi mixed film deposition
Krauss, D.; Kaufmann, C.; Raschke, T.
Wissenschaftliche Zeitschrift der Technischen Hochschule Karl-Marx-Stadt 29(4): 546-552
1987
ISSN/ISBN: 0372-7610 Document Number: 293141
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